Seven people were killed and 10 others got injured in a stampede at Karuppasami temple in the district on Saturday night.
Thousands of devotees had gathered at the temple on Saturday night to offer prayers on the occasion of Chitra Poornima.
Prime Minister Narendra Modi has expressed his condolences over the incident.
The PM wrote on his official Twitter handle, "Saddened by the loss of lives due to the stampede at a temple in Thuraiyur, Trichy. My condolences to the families of those who passed away and prayers with the injured. All possible help is being extended by the authorities."
The Prime Minister also announced an ex-gratia of Rs 2 lakh to the families of the deceased, as well as Rs 50,000 each to those injured in the incident.
"An ex-gratia of Rs 2 lakh each for the next of kin of those who passed away has been approved from the PM's National Relief Fund. Rs 50,000 each for the injured has also been approved," the tweet read.
The injured have been admitted to the government hospital in Thuraiyur for treatment.