Spain's Ferrer, seeded sixth, yesterday schooled Benneteau as the Frenchman played in his first semi-final at the elite Masters 1000 level.
He needed just 71 minutes to seal the victory and give himself a shot at adding a second title of 2014 to the trophy he lifted in Buenos Aires.
The 32-year-old Spaniard also reached the final at Hamburg this year, but he last played a Masters final in November, when he lost to Novak Djokovic at Paris Bercy.
Ferrer will aim for his 22nd career trophy when he faces off today against either second-seeded Roger Federer or Canadian Milos Raonic, the fifth seed.
"I played very consistently, and got the break, then I could play with calm," he said, calling the match "maybe my best of the week".
"I played without a lot of mistakes but it was difficult to return sometimes.