The theerthavari event is considered the most sacred to take a holy dip in the Mahamaham tank.
Police said more than five lakh people took a holy dip in the tank today.
Since February 13, more than 25 lakh people have taken a holy dip as part of the festival, which falls once in 12 years.
Official sources said deities from 12 Shiva temples were taken in a procession to the banks of the tank and pujas were performed before the Theerthavari was held.
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Meanwhile, a Rameswaram report said thousands of devoteesoffered prayers during theerthavari at the 'Jatamakuda theertham' in the island town on the auspicious Masimakam day today.
The priests, who conducted Theerthavari for lord Shiva and goddess Parvathavarthini after special poojas to Sri Ramanathaswamy and goddess Parvathavarthini, brought the deities to the tank at 12 noon when the theerthavari was held.
The deities left Sri Ramanathaswamy at 7 am and reached the tank at 12 am.
The officials said around 1 lakh devotees were present at the venue.
The water from the tank was sprinkled on the devotees after the theerthavari (bathing of deities) function.