The military says the attack took place today afternoon in the Gush Etzion settlement bloc south of Jerusalem. The attacked family, a Jewish woman and four girls, were sitting inside a car when the attacker threw acid at them.
Israeli police said they were slightly injured. Acid attacks are rare in Israel and the Palestinian territories.
Over the past month, 11 people have been killed in Palestinian attacks, mostly in Jerusalem, though there have been other attacks in Tel Aviv and the West Bank.