The "Friends" actress, Aniston, tied the knot with Theroux at their Los Angeles home where they were joined by a host of celebrity friends including Robert and Howard who toasted the happy couple, reported TMZ.
"Cougar Town" actress Courteney Cox was Aniston's maid of honour, over 20 years after they met on the hit TV sitcom "Friends".
Their co-star Lisa Kudrow also attended the nuptials.
Sia reportedly performed at the bash while Samantha Ronson played the DJ.
Aniston 46, and 43-year-old Theroux cut a giant vanilla and strawberry cake, topped with two puppets.
Other A-list well-wishers included Chelsea Handler, Jason Bateman, Ellen DeGeneres and Portia de Rossi and Emily Blunt and husband John Krasinski.