Light rainfall occurred in several places in districts of Chennai, Tiruchirappalli, Sivaganga, Tiruvallur, Villupuram and Kancheepuram while some parts in Ramanahtpram district received heavy rainfall.
Voters reached the polling stations with umbrellas like former Union Minister P Chidambaram in Sivaganga district.
The rains were caused by a low pressure over the Indian Ocean, which continued to remain stationary.
"The low pressure area over Indian Ocean and adjoining southwest Bay of Bengal had become wellmarked and lay over the southwest Bay of Bengal and adjoining Sri Lanka," a bulletin from the Met department said.
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"Heavy rainfall is also likely to occur at one or two places over North Coastal Tamil Nadu and Puducherry", it said.
For Chennai and its neighbourhood, the bulletin said that sky is likely to be partly cloudy.
"Light rain is likely to occur in some areas", it said.
Meanwhile, DMK Legal wing secretary R S Bharathi in a representation to Chief Electoral Officer Rajesh Lakhoni appealed the Election Commission to extend the polling time by one hour from 6 PM to 7 PM as many places in Tamil Nadu were receiving rainfall.