Other passengers were allowed to disembark. But a passenger with a fever who had traveled from Nigeria was taken by ambulance with a driver wearing protective gear to Madrid's Carlos III hospital.
Another person with a fever who came into contact with infected Spanish nursing assistant Teresa Romero before she was hospitalized on October 6 was also sent to the same hospital, the Health Ministry said. Romero's condition, meanwhile, appeared to be improving, a ministry official said.
A fourth person, a Red Cross health worker who recently worked with Ebola patients in Sierra Leone, was hospitalized with a fever in Tenerife in the Canary Islands, officials said. Two roommates showing no symptoms were placed in hospital isolation as a precaution.
The Air France flight carrying 163 people was isolated after arriving from Paris in a remote part of Madrid's airport for disinfection.
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Meanwhile, Danish authorities tested a medical worker who had been in West Africa.
In Geneva, a World Health Organization official said the Ebola death toll will rise to more than 4,500 this week from among 9,000 people infected.