Under the new regulations, Taiwanese manufacturers will be permitted to open a total of three plants manufacturing chips more advanced than were previously allowed.
But local chip makers will still be required to keep their Taiwan-produced technology a generation ahead of that made in mainland China, Chu Ping, spokeswoman for the Investment Commission, told AFP.
This is based on fears the island could lose a competitive edge over China, which still regards Taiwan as part of its territory awaiting reunification -- though ties have warmed since Ma Ying-jeou of the Beijing-friendly Kuomintang party came to power in 2008.
"Intel and Samsung have been investing in the mainland for a year, so our relaxing is already a bit late," Chu said.
Taiwan's opposition, which favours independence from Beijing, has repeatedly warned against easing controls, fearing closer economic integration.